ICS 29.045 CCS H 80/84 团体 标准 T/CASAS 032—2023 碳化硅晶片表面金属元素含量的测定 电感耦合等离子体质谱法 Test method for the content of metal elements on the surface of silicon carbide wafer —Inductively coupled plasma mass spectrometry 版本：V01.00 2023-06-19发布 2023-06-19实施 第三代半导体产业技术创新战略联盟 发布 全国团体标准信息平台 T/CASAS 032—2023 I 目 次 前言 ................................ ................................ ................................ ................................ ................................ .... III 引言 ................................ ................................ ................................ ................................ ................................ .... IV 1 范围 ................................ ................................ ................................ ................................ ................................ .. 1 2 规范性引用文件 ................................ ................................ ................................ ................................ .............. 1 3 术语和定义 ................................ ................................ ................................ ................................ ...................... 1 4 方法提要 ................................ ................................ ................................ ................................ .......................... 2 5 方法原理 ................................ ................................ ................................ ................................ .......................... 2 6 干扰因素 ................................ ................................ ................................ ................................ .......................... 2 7 试剂与材料 ................................ ................................ ................................ ................................ ...................... 2 8 测量仪器与测试环境 ................................ ................................ ................................ ................................ ...... 3 测量仪器 ................................ ................................ ................................ ................................ ................... 3 测试环境 ................................ ................................ ................................ ................................ ................... 3 9 直接酸滴分解法扫描溶液的制备 ................................ ................................ ................................ .................. 3 手动法 ................................ ................................ ................................ ................................ ....................... 3 自动法 ................................ ................................ ................................ ................................ ....................... 4 10 待测元素质量数选择 ................................ ................................ ................................ ................................ .... 4 11 校准曲线 ................................ ................................ ................................ ................................ ........................ 4 12 测定次数 ................................ ................................ ................................ ................................ ........................ 4 13 试验数据处理 ................................ ................................ ................................ ................................ ................ 4 14 精密度 ................................ ................................ ................................ ................................ ............................ 5 15 试验报告 ................................ ................................ ................................ ................................ ........................ 5 全国团体标准信息平台 T/CASAS 032—2023 III 前 言 本文件按照 GB/T 1.1 —2020《标准化工作导则 第1部分：标准化文件的结构和起草规则》的规 定起草。 请注意本文件的某些内容可能涉及专利。本文件的发布机构不承担识别 专利的责任。 本文件由北京第三代半导体产业技术创新战略联盟标准化委员会（