ISO INTERNATIONAL STANDARD 15632 Third edition 2021-02 Microbeam analysis Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA) Reference number IS0 15632:2021(E) ISO @ IS0 2021 IS0 15632:2021(E) COPYRIGHT PROTECTED DOCUMENT @ISO2021 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting on the internet or an intranet, without prior written permission. Permission can be requested from either Iso at the address below or ISo's member body in the country of the requester. ISO copyright office CP 401 · Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone:+4122 749 0111 Email: copyright@iso.org Website: www.iso.org Published in Switzerland ii IS02021-Allrightsreserved