ISO INTERNATIONAL STANDARD 23216 First edition 2021-05 Carbon based films Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry Films a base de carbone - Détermination des propriétes optiques des films de carbone amorphe par ellipsométrie spectroscopique Reference number IS0 23216:2021(E) ISO ISO2021 IS0 23216:2021(E) COPYRIGHTPROTECTED DOCUMENT @IS02021 All rights reserved. Unless otherwise specified, or required in the context of its implementation, no part of this publication may be reproduced or utilized otherwise in any form or by any means, electronic or mechanical, including photocopying, or posting below or Iso's member body in the country of the requester. IsO copyright office CP 401 : Ch. de Blandonnet 8 CH-1214 Vernier, Geneva Phone: +41 22 749 01 11 Email: copyright@iso.org Website: www.iso.org Published in Switzerland ii @ IS0 2021 - All rights reserved