ISO INTERNATIONAL STANDARD 14291 First edition 2012-07-15 Vacuum gauges Definitions and specifications for quadrupole mass spectrometers Manometres a vide - Definitions et spécifications des spectrometres de masse quadripolaires Reference number ISO 14291:2012(E) LSO @ ISO 2012 py IHS under lic n or networking permitted without license from IHS Not for Resale ISO 14291:2012(E) COPYRIGHTPROTECTEDDOCUMENT ISO2012 All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including photocopying and microfilm, without permission in writing from either ISO at the address below or ISO's member body in the country of the requester. ISO copyright office Case postale 56 · CH-1211 Geneva 20 Tel. + 41 22 749 01 11 Fax + 4122 749 09 47 E-mail copyright@iso.org Web www.iso.org Published in Switzerland @ ISO 2012 -All rights reserved No reproductic etworking permitted without license from IHS Not for Resale ISO 14291:2012(E) Contents Page Foreword ..iv Introduction 1 Scope. 2 Terms and definitions... 2.1 Definitions of components. 2.2 Definitions of physical parameters. 5 3 Symbols and abbreviated terms .. 8 4 Principle of QMS... 9 5 Specifications fora QMstobeprovided bymanufacturers 9 5.1 Mass range... 9 5.2 Type of ion source.... 9 5.3 Type of ion detector. 9 5.4 Mass resolution ... 10 5.5 Mass number stability. 10 5.6 Sensitivity. 10 5.7 Linear response range. 10 5.8 Minimumdetectablepartialpressure 10 5.9 Minimum detectable concentration. 10 5.10 Maximum operational pressure.. 10 5.11 Scanning parameter 10 5.12 Signal output.. 11 5.13 Potentials.. 5.14 Detector specifications. 11 5.15 Set point.... 5.16 Maximum bake-out temperature 11 5.17 Nominal operating conditions. 11 5.18 Warm-up time .. 5.19 Filament material... 11 5.20 Electron emission current. 5.21 Filament exchange.. 5.22 Detector exchange... 11 5.23 Fitting to chamber... 12 5.24 Mounting orientation 12 5.25 Dimensions 12 5.26 Internal volume ... 12 5.27 Mass of sensor head and electronic unit. 12 5.28 Inputpowerofelectronicunit. 12 5.29 Cable 12 5.30 Software 12 5.31 Interface 12 5.32 Storage and transportation condition. 12 6 Optional specifications for QMS to be provided by manufacturers 13 6.1 Mass resolution ... ..13 6.2 Fragmentation or cracking pattern.. 13 6.3 Temperature coefficient of sensitivity 6.4 QMS sensor cleaning. 13 6.5 Degassing... 13 6.6 Degassing power 13 6.7 Photographs 13 6.8 Inspection record 6.9 Outgassing rate 13 Bibliography 14 ili ense with ISt ted withoutlicensefrom IHS Not for Resale